Presentation Information

[Mo-1B-04]Efficient and interpretable optimization of cooling conditions for dislocation density reduction in SiC crystal growth

*Ryo Fukasawa1, Toru Asahi1, Fumihiro Fujie2, Hidekazu Tsuchida2 (1. Waseda Univ. (Japan), 2. Central Res. Inst. of Electric Power Indus. (Japan))