Presentation Information

5:30 PM - 5:50 PM JST(8:30 AM - 8:50 AM UTC)

[Mo-2A-02]Surface Morphology Evolution During Hydrogen Etching of 4H-SiC (0001) in limited regions

*Alfio Samuele Mancuso^1,2, Francesco La Via², Marco Mauceri³, Massimo Camarda⁴, Corrado Bongiorno², Salvatore Pannitteri², Simona Boninelli² (1. Univ. of Catania (Italy), 2. Inst. of CNR-IMM (Italy), 3. Manufac. of ASM International (Italy), 4. Res. of STLab (Italy))

Back to Session information