Presentation Information
[Mo-2A-04]A Novel Non-Alloyed Sc-Based Low Work-Function Metal Scheme for Ohmic Contacts to N-type 4H-SiC
*Abdul Hannan Yeo1,2, Jay Sin Jie Liew1, Yu-Chieh Chien1, Qin Gui Roth Voo1, Zijie Zheng1,2, Xiaolin Wang1,2, Leming Jiao1,2, Runze Wang1, Liyuan Liu1, Lakshmi Kanta Bera1, Shiv Kumar1, Umesh Chand1, Navab Singh1, Xiao Gong1,2, Yee Chia Yeo1,2 (1. Inst. of Microelectronics (IME), A*STAR (Singapore), 2. National Univ. of Singapore (Singapore))
