Presentation Information
[Mo-P-01]Ultra-High Resistivity 4H-SiC Bulk Crystal Grown by HTCVD with Extremely Low Impurity Incorporation
Zhenzhou Yuan1, *Yuchen Shi2, Xu Pang2, Xinyu Liu2, Qiangqiang Wang1, Shengping He1 (1. Chongqing University (China), 2. Hypersics Corp. Ltd. (China))