Presentation Information

[Mo-P-04]Evaluation of Nitrogen Incorporation in Polycrystalline and Polytype SiC wafers by Micro-Raman Spectroscopy

Minoru Oikawa1, Koutaro Tetsu1, Kousuke Shimano1, Shunya Sakane1, *Haruhiko Udono1 (1. Ibaraki University (Japan))