Presentation Information
[Mo-P-09]Effect of dual-zone heat treatment on residual stress and defect conversion in bare 4H-SiC wafers
*Chan-Ho Park1, Sang-Jin Bae1, Ho-Gyun Yun1, Mi-Seon Park1, Kwang-Hee Jung1, Jong-Gon Kim1, Kap-Ryeol Ku2, Yun-Ji Shin3, Seong-Min Jeong3, Won-Jae Lee1 (1. Dong-Eui University (Korea), 2. Ein Crystal (Korea), 3. Korea Institute of Ceramic Engineering and Technology (KICET) (Korea))