Presentation Information

[Mo-P-12]Investigation of Graphite Etching by SiC Vapors in the PVT Process

*Yann Gallou1,2, Fernanda Leite de Azevedo2, Abdelmagid El Bakali2, Alexandre Potier1, Andy Covac3, Megan Kephart3, Didier Chaussende2 (1. Mersen France (France), 2. Univ. Grenoble Alpes, CNRS, Grenoble INP, SIMaP (France), 3. Mersen US (USA))