Presentation Information
[Mo-P-14]Thick SiC Epitaxial Layers grown on Engineered Substrates
*Rachael L. Myers-Ward1, Nadeemullah A. Mahadik1, Alec N. Imhof1, Benjamin J. Sekely1, Jenifer R. Hajzus1, Walter Schwarzenbach2, Alexis Drouin2 (1. U.S. Naval Research Laboratory (USA), 2. Soitec (France))