Presentation Information
[Mo-P-15]Optimization of Closed Sublimation Growth for Thick and Smooth Fluorescent 4H-SiC Epilayers
*Aoto Hashiguchi1, Ryuya Matsumoto1, Shoki Ohara1, Kyoya Okawa1, Motoaki Iwaya1, Tetsuya Takeuchi1, Atsushi Suzuki2, Eri Akazawa2, Weifang Lu3, Satoshi Kamiyama1 (1. Meijo Univ. (Japan), 2. E&E Evolution Ltd. (Japan), 3. Xiamen Univ. (China))