Presentation Information
[Mo-P-16]Alternative Silicon and Carbon Precursors for 4H-SiC Epitaxy
*Maximilian Titl1, Christian Wissgott1, Michael Pfeffer2, Johannes Koehler2, Kevin Albrecht2, Birgit Kallinger1 (1. Fraunhofer Inst. for Integrated Systems and Device Technology IISB (Germany), 2. AIXTRON SE (Germany))