Presentation Information
[Mo-P-17]Epitaxial Thickness and Surface Roughness Process Control as Enablers for Zero Defect Automotive SiC Power Devices
*Nicolo Piluso1, Cristiano Calabretta1, Fabiana Vento1, Andrea Severino1, Antonio Rossitto1, Alice Lombardo1, Nicoletta Spampinato1, Antonio Criscuolo1, Simone Rosin1, Anna Martiniello1, Antonio Volzone1, Dmitrii Rusakov2, Sah Kaushik2, Pauline Begoc2, Federico Buja2, Matteo Salamone2, Federico Giuffrida2, Parikshit Sharma2, Paolo Parisi2, Giuseppe Arena1 (1. Indus. STmicroelectronics (Italy), 2. Indus. KLA Corporation (USA))