[Mo-P] Poster Session

[Mo-P-19] Comparative Study of Hydrogen Etching Kinetics on Si (0001) and C (000-1) Terminated 4° Off-Cut 4H-SiC

*An Min Amanda Lee^1,2, Shiv Kumar¹, Eng Soon Tok², Umesh Chand¹, Tanmay Ghosh¹, Xuan Sang Nguyen¹, Xiao Gong¹, Navab Singh¹, Yee-Chia Yeo^1,3 (1. Inst. of Microelectronics (IME), A*STAR (Singapore), 2. Department of Physics, National Univ. of Singapore (Singapore), 3. Department of Electrical and Computer Eng., National Univ. of Singapore (Singapore))