Presentation Information

[Mo-P-20]Towards Thick and Highly p-Doped 4H-SiC Epitaxial Structures

*Marco Mauceri1, Mario Lizzio1, Vincent Lafage1, Chiara Cuccia1, Maria Luisa Alonzo1, Silvio Preti1, Marco Zignale2, Patrick Fiorenza2, Fabrizio Roccaforte2 (1. ASM International (Italy), 2. CNR-IMM (Italy))