Presentation Information

[Mo-P-20]SiC 4H Thick Highly p type Doped Epitaxy

*Marco Mauceri1, Mario Lizzio1, Vincent Lafage1, Maria Luisa Alonzo1, Silvio Preti1, Marco Zignale2, Patrick Fiorenza2, Fabrizio Roccaforte2 (1. ASM International (Italy), 2. CNR-IMM (Italy))