Presentation Information
[Mo-P-23]Polarity-Driven Phase Transformation and Giant Stress Divergence in UV Nanosecond Laser-Irradiated 4H-SiC
*Ping-Yu Lin1, Hsiang-En Weng1, Chiao-Yang Cheng1, Yi-Chi Lee2, Yi-Chang Wu3, Zi-Hao Wang1, Yan-Kuin Su1 (1. National Cheng Kung Univ. (Taiwan), 2. Indus. Technology and Research Inst. (Taiwan), 3. GeChi Compound Semiconductor Corp. Ltd (Taiwan))