[Mo-P] Poster Session

[Mo-P-26] Annihilation and Local Unfaulting Inside a Triangular Double Shockley-type Stacking Fault in 4H-SiC Epitaxial layer

Soon-Ku Hong¹, Moonkyong Na², Dohyung Kim³, Hyundon Jung³, Natsuko ASANO Asano⁴, *shunsuke asahina^4,5 (1. Chungnam National University (Japan), 2. Korea Electrotechnology Research Institute (Japan), 3. Horiba STEC Korea (Korea), 4. JEOL Ltd (Japan), 5. Tohoku University (Japan))