Presentation Information
[Mo-P-27]Low-Temperature Cathodoluminescence Characterization of Residual Defects in High-Dose Al-Implanted 4H-SiC
*Tomoyuki Uchida1, Shinya Honda1, Ryuichi Sugie2 (1. Toray Research Center, Inc. (Japan), 2. Univ. of Ritsumeikan (Japan))