Presentation Information
[Mo-P-38]Process Integration Strategies for High-Yield Manufacturing of Large-Area 6.5-kV SiC MOSFETs
*Youngsang Kim1, Chris Wu1, Benjamin Wang1, Justin Lynch2, Alecsander N Imhof3, Nadeemullah A Mahadik3, Rachael L Myers-Ward3, Seung-Yup Jang2, Adam J Morgan2, Woongje Sung2, Michael Owen1, Anant A Agarwal2 (1. Defense Microelectronics Activity (DMEA) (USA), 2. NoMIS Power (USA), 3. U.S. Naval Research Lab. (USA))