[Mo-P] Poster Session

[Mo-P-42] Improving Surface Roughness and Internal Stress by UV Nanosecond Laser Treatment for Laser-Structured 4H-SiC with Micro Pin-Fin Arrays

*Hsiang-En Weng¹, Ping-Yu Lin¹, Chiao-Yang Cheng¹, Di-Hua Huang², Yi-Chang Wu³, Zi-Hao Wang¹, Yang-Kuin Su¹ (1. National Cheng Kung Univ. (Taiwan), 2. JUMBO LASER CO Ltd. (Taiwan), 3. GeChi Compound Semiconductor Crop Ltd. (Taiwan))