Presentation Information
[Mo-P-66]Wafer-Scale Reliability of SiC MOSCAPs With Post-Oxidation NO Rapid Thermal Processing
*Hyeon-Do Kang2, Xiaofan Ma1, Efe Akman1, Mattias Ekström1, Ye-Jin Kim2, Per-Erik Hellström1, Sang-Mo Koo2, Carl-Mikael Zetterling1 (1. KTH Royal Inst. of Tech. (Sweden), 2. Kwangwoon Univ. (Korea))