Presentation Information
[Mo-P-77]AlGaN/GaN HEMTs on 3C-SiC/Si-substrates with all TiN contact system
Wael Jatal2,1, Vladislav Kurtash1, Joern Pezoldt5,4, Uwe Baumann3, Saadman Abedin1, *Joerg Pezoldt1 (1. TU Ilmenau (Germany), 2. X-Fab Semiconductor Foundries GmbH (Germany), 3. IMMS gGmbH (Germany), 4. Swiss Institute of Bioinformatics (Switzerland), 5. École Polytechnique Fédérale de Lausanne (Switzerland))