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[Mo-P-86]Enabling Next Generation High Voltage Power Applications Through Thick 4HSiC Epitaxy

Tawhid Rana1, *Dong Lee1, Taye Tarekegn1, Srujana Prayakarao1, Nadeemullah Mahadik2, Alecsander Imhof2, Shanthi Subramanian1 (1. Coherent Corp. (USA), 2. US Naval Res. Lab. (USA))