[Th-2A] Interface Charge

2:30 PM - 2:50 PM JST(5:30 AM - 5:50 AM UTC)

[Th-2A-04] Decoupling Effective Field, Screening, and Temperature Dependencies of Inversion Layer Mobility in SiC MOSFETs: Physical Insight into Dominant Scattering Mechanisms

*Tetsuo Hatakeyama¹, Hirohisa Hirai², Mitsuru Sometani², Mitsuo Okamoto², Shinsuke Harada² (1. Toyama Prefectural Univ. (Japan), 2. AIST (Japan))