[Th-P] Poster Session

[Th-P-06] Non-contact Electrical Characterization of Oxidized p-type 4H SiC Using Corona C-V Metrology

*Marshall Wilson¹, Robin Karhu², Mathias Rommel², Jannik Schwarberg³, Bradley Wilson¹, Joanna Wincukiewicz¹, Adam Wincukiewicz¹, Ivan Shekerov¹ (1. Onto Innovation (USA), 2. Fraunhofer IISB (Germany), 3. Friedrich-Alexander-Universität (Germany))