[Th-P] Poster Session

[Th-P-09] High-Voltage 4H-SiC PiN Diodes: Ion Implantation vs. Epitaxial Growth for Wide-Temperature Operation

*Alfio Samuele Mancuso^1,2, Saverio De Luca², Enrico Sangregorio², Annamaria Muoio², Erik Gallo³, Eleonora Quadrivi³, Silvia Vanellone³, Antonio Trotta³, Marco Mauceri⁴, Salvatore Tudisco⁵, Francesco La Via² (1. Univ. of Catania (Italy), 2. Inst. of CNR-IMM (Italy), 3. Corp. of ENI S.p.a (Italy), 4. Manufac. of ASM International (Italy), 5. Inst. of INFN-LNS (Italy))