[Th-P] Poster Session

[Th-P-10] Optimization of Ion Implantation for Suppressing Stacking Fault Expansion in 4H-SiC

*Tong Li¹, Hitoshi Sakane², Shunta Harada³, Masashi Kato¹ (1. Nagoya Inst. of Tech. (Japan), 2. SHI-ATEX Co., Ltd. (Japan), 3. Nagoya Univ. (Japan))