[Th-P] Poster Session

[Th-P-11] Structural and Electrical Characterization of He Ion Implanted 4H-SiC

*Ben J. Sekely¹, Cory D. Cress¹, Jeffery M. Woodward¹, Daniel J. Pennachio¹, Ignas Lekavicius¹, Jenifer R. Hajzus¹, Rachael L. Myers-Ward¹ (1. U.S. Naval Research Lab. (USA))