Presentation Information
[Th-P-12]Implant Annealing of 4H SiC Using a Standard RTP Platform System
*Peter Benkart1, David Mendler2, Thorsten Hülsmann3, Philipp Fricker3, Michael Storek3 (1. Mattson International GmbH (Germany), 2. Infineon Technologies Austria AG (Austria), 3. Mattson Thermal Products GmbH (Germany))
