[Th-P] Poster Session

[Th-P-13] Medeor^TM Non-Uniform Ion Implantation for Device Performance and Yield Enhancement in SiC Power Devices

*Nan Zheng¹, Supakit Charnvanichborikarn¹, Tyler Wills¹, Scott Oleson¹, Hans Gossmann¹, Xiangdong He¹, Shan Tang¹, William Bogiages¹, Pratim Palit¹, Jonathan Lowder¹, Shardul Patel¹, Wei Zou¹, Jay Scheuer¹ (1. Applied Materials, Inc. (USA))