[Th-P] Poster Session

[Th-P-14] Technology Development of Implantation Masks for a Multi Epitaxy, Multi Implant Approach for 4H-SiC Superjunction Drift Zones

*Janina Engelhardt¹, Oleg Rusch¹, Volker Häublein¹, Nikolas Schabert¹, Rupert Ullmann², Philip Hens², Birgit Kallinger¹, Michael Jank¹ (1. Fraunhofer Inst. for Integrated Systems and Device Technology IISB (Germany), 2. Aixtron SE (Germany))