Presentation Information
[Th-P-16]Effect of Sputter-Deposited Carbon Capping on Surface Stability and Interface Trap Suppression in 4H-SiC
*Jaeyoon Kim1, Yehwan Kang1, Junghyun Moon2, Denes Ullrich3, Janos Szivos3, Laszlo Balogh3, Zoltan Bozoki3, Changheon Yang1 (1. SK powertech (Korea), 2. Korea Electrotechnology Research Inst. (Korea), 3. SEMILAB (Hungary))