[Th-P] Poster Session

[Th-P-18] Effect of Ion Implantation on Thermal Oxidation in n-Type 4H-SiC

*An Min Amanda Lee^1,2, Jinlong Liu^2,1, Zirui Tan^2,1, Shiv Kumar¹, Eng Soon Tok², Umesh Chand¹, Woo Bin Song¹, Xiao Gong¹, Navab Singh¹, Yee-Chia Yeo^1,3 (1. Inst. of Microelectronics (IME), A*STAR (Singapore), 2. Department of Physics, National Univ. of Singapore (Singapore), 3. Department of Electrical and Computer Eng., National Univ. of Singapore (Singapore))