[Th-P] Poster Session

[Th-P-28] Optically Detected Magnetic Resonance of Silicon Vacancies in 4H-SiC Formed by High Fluence Electron Irradiation

*Akinori Nishimoto^1,2, Shin-ichiro Sato², Koichi Murata³, Masafumi Hanawa³, Hidekazu Tsuchida³, Seiichi Saiki², Yuichi Yamazaki², Takeshi Ohshima^2,4, Yasuto Hijikata¹ (1. Univ. of Saitama (Japan), 2. National Inst. for Quantumn Science and Tech. (Japan), 3. Central Res. Inst. of Electric Power Industry (Japan), 4. Univ. of Tohoku (Japan))