[Th-P] Poster Session

[Th-P-30] A Novel Process for Fabricating Thick Bottom OXide (TBOX) UMOSFET on 4H-SiC

*An-Ching Li¹, Li-Tien Hsueh¹, Bing Yue Tsui¹, Chia-Lung Hung², Yi-Kai Hsiao² (1. National Yang Ming Chiao Tung Univ. (Taiwan), 2. Hon Hai Research Inst. (Taiwan))