[Th-P] Poster Session

[Th-P-37] First Demonstration of 200mm Wafer Level 6.5 kV-Class 4-H SiC PiN Diodes

*Xinghua Wang¹, Zhaoxue Yuan², Xiaolin Wang^1,3, Abhishek Mishra¹, Yu-Chieh Chieh¹, Peter Gammon², Marina Antoniou², Weijie Wang¹, Nikolaos Iosifidis², Zijie Zheng^1,3, Arne Renz², Qin Gui Voo¹, Shiv Kumar¹, Umesh Chand¹, Leming Jiao^1,3, Runze Wang¹, Arvind Sundaram¹, Liyuan Liu¹, Xiao Gong^1,3, Navab Singh¹, Yee Chia Yeo^1,3 (1. Institute of Microelectronics, Agency for Science, Technology, and Research (A*STAR) (Singapore), 2. University of Warwick (UK), 3. National University of Singapore (Singapore))