Presentation Information
[Th-P-60]Influence of Plasma Activation on Surface Chemistry and Wafer Bonding of 4H-SiC
*Jimmy Thörnberg1, Peter Kerepsi2, Joseph Halim1, Michael Dornetshumer2, Björn Magnusson1 (1. STMicroelectronics Silicone Carbide AB (Sweden), 2. EV Group (Austria))
