[Th-P] Poster Session

[Th-P-63] Simulation of Ablation Phenomena in Laser Processing
-Proposal of a New Method:the Normalization Group MD for SiC Wafers-

*Mariko Tachibana¹, Daiji Ichishima¹, Ryunosuke Kitahara¹, Hirotaka Miyazaki¹, Shuji Miyazaki¹, Sachi Yawaka¹, Yoshiyuki Tomita¹ (1. Sumitomo Heavy Industries, Ltd. (Japan))