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[Th-P-65]
Exploring CMP Machine Parameters via a U-Net model and Genetic Algorithm
*Kevin Operiano
1
, Roberto Iaconi
1
, Fumiya Kawate
1
, Saeed Sepasy
2
, Yoshifumi Watanabe
2
(1. Aixtal Corp. (Japan), 2. Mipox Corp. (Japan))
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