[Th-P] Poster Session

[Th-P-69] Subsurface Damage Generation and Control during SiC Polishing

*Michael A Robison^1,2, William Gemmill³, Caroline Wattinez³, Evan Krohn^1,2, Matthew Krohn^1,2, Joshua A Robinson^1,2 (1. The Pennsylvania State Univ. (USA), 2. Silicon Carbide Innovation Alliance (USA), 3. Pureon Inc. (USA))