Presentation Information
[Th-P-73]Systematic Investigation and Reduction of Triangle-Shaped Defects (TriDs) in Thick SiC Epitaxial Layers
*Bumjoon Kim1, Michael Coco1, Hyun-Don Jung2, Soo Min Lee1, Drew Hanser1 (1. Veeco Instruments Inc. (USA), 2. HORIBA STEC KOREA, Ltd. (Korea))
