[Th-P] Poster Session

[Th-P-74] Epitaxial Wafer Engineering for Free-Standing 4H-SiC Membrane Beam Monitors and Harsh-Environment Detector Platforms

*Marco Mauceri¹, Gabriele Trovato^5,3,6,4, Mario Lizzio¹, Maria Luisa Alonzo¹, Silvio Preti¹, Massimo Camarda^2,5,4 (1. ASM International (Italy), 2. Sensic (Switzerland), 3. INFN (Italy), 4. IMM-CT (Italy), 5. STlab (Italy), 6. Dipartimento di Fisica e Astronomia “Ettore Majorana” (Italy))