ICSCRM2026
Past Programs
Help
Main Menu
General information
Announcements(0)
Timetable
Mon. Sep 28, 2026
Tue. Sep 29, 2026
Wed. Sep 30, 2026
Thu. Oct 1, 2026
Fri. Oct 2, 2026
Program
Sessions
Search presentations
Advanced Search
Top
Sessions
Session Details
Presentation Information
Presentation Information
[Th-P-81]
Structural Analysis of Stacking Fault Complexes with Different Characteristics in 4H-SiC Epitaxial Wafer
*Shohei Hayashi
1
, Junji Senzaki
2
(1. Toray Research Center Inc. (Japan), 2. AIST (Japan))
Back to Session information