[Th-P] Poster Session

[Th-P-85] Comparative Study of Crystal Defect Imaging in 4H-SiC Wafers Using Synchrotron X-ray Topography, Optical Inspection, and Multiphoton Photoluminescence

*Jiayi Liang¹, Yuhui Huang¹, Hirofumi Hoshida², Shota Fujiki², Takayoshi Shimura^1,3 (1. Waseda Univ. (Japan), 2. Lasertec Corp. (Japan), 3. RIKEN SPring-8 Center (Japan))