[Th-P] Poster Session

[Th-P-86] A SWB-XRT study of defects within trench refill epitaxy for 4H-SiC superjunctions

Robin Scales², Gerard Colston¹, Arash Estiri¹, Athul Rathnakar¹, Oliver Fox³, Tamzin Lafford⁴, Kelly Turner¹, Marina Antoniou¹, Arne Ben Renz¹, Peter M Gammon¹, Dong Lilly Liu², *Vishal Ajit Shah¹ (1. University of Warwick (UK), 2. University of Oxford (UK), 3. Diamond Light Source (UK), 4. Bruker Ltd (UK))