Presentation Information
[Th-P-89LN]Thermal Field Optimization toward Improved Crystal Quality of 12-inch n-type 4H-SiC Single Crystals Grown by PVT
*Chengjin Qin1, Xianglong Yang1, Xiufang Chen1, Guanglei Zhong1, Xuejian Xie1, Zhenxing Fu1, Xixi Xiong1, Wenhao Han1, Guojian Yu2, Xiangang Xu1 (1. Shandong University (China), 2. Guangzhou Summit Crystal Semiconductor Co., Ltd (China))