Presentation Information
[Th-P-94LN]Contrasting Effects of Stopped and Through-Wafer Proton Implantation on Shockley Stacking-Fault Expansion in 4H-SiC
*Kazumi Takano1, Yasuyuki Igarashi1, Yohsuke Matsushita1, Takuya Morita1, Hiroumi Matsui1 (1. ITES (Japan))