Presentation Information

[Tu-1B-02]Growth and Defect Analysis of Low-Doped 4H-SiC Bulk Crystals Grown by High-Temperature CVD

*Satoshi Matsuzawa1,2, Fumihiro Fujie1, Satoshi Asada1, Dai Kutsuzawa1, Tomohiro Shonai2, Hidekazu Tsuchida1 (1. Central Res. Inst. of Electric Power Indus. (Japan), 2. Resonac Corp. (Japan))