[Tu-2A] FinFET and Trench Interfaces

11:30 AM - 11:50 AM JST(2:30 AM - 2:50 AM UTC)

[Tu-2A-03] Separated Source Sum-Difference (S3D) Extraction Method for Accurate Trench Sidewall Mobility Evaluation in SiC Trench MOSFETs

*Leming Jiao^1,2, Yu-Chieh Chien¹, Zijie Zheng^1,2, Xiaolin Wang^1,2, Runze Wang¹, Weijie Wang¹, Abdul Hannan Yeo¹, Qin Gui Voo¹, Liyuan Liu¹, Xinghua Wang¹, Umesh Chand¹, Xiao Gong^1,2, Navab Singh¹, Yee Chia Yeo^1,2 (1. Inst. of Microelectronics (IME), A*STAR (Singapore), 2. National Univ. of Singapore (Singapore))