Presentation Information

11:50 AM - 12:10 PM JST(2:50 AM - 3:10 AM UTC)

[Tu-2A-04]Unveiling Face-Dependent Mobility-Limiting Scattering Mechanisms in 4H-SiC Trench Sidewall Channels

*Xiaolin Wang^1,2, Yu-Chieh Chien¹, Leming Jiao^1,2, Zijie Zheng^1,2, Weijie Wang¹, Runze Wang¹, Xinghua Wang¹, Abdul Hannan Yeo¹, Qin Gui Voo Roth¹, Liyuan Liu¹, Umesh Chand¹, Xiao Gong^1,2, Navab Singh¹, Yee Chia Yeo^1,2 (1. Inst. of Microelectronics (IME), A*STAR (Singapore), 2. National Univ. of Singapore (Singapore))

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