Presentation Information

11:10 AM - 11:30 AM JST(2:10 AM - 2:30 AM UTC)

[Tu-2B-02]Synchrotron X-ray Topography Observation of BPD Loops in Thick 4H-SiC Epilayers (60um-110um) Originating from Prismatic Slip Dislocations in 4H-SiC Substrates

Kaixuan Zhang¹, Zeyu Chen¹, Jianpei Zhang¹, Haochi Wang¹, Jaehyun Suh¹, Alecsander Imhof², Nadeem Mahadik², *Balaji Raghothamachar¹, Michael Dudley¹ (1. Stony Brook University (USA), 2. U.S. Naval Research Laboratory (USA))

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