Presentation Information

11:30 AM - 11:50 AM JST(2:30 AM - 2:50 AM UTC)

[Tu-2B-03]Wafer-scale characterization of threading mixed dislocations in 4H-SiC using commercial X-ray topography and polarized light microscopy

*Shunta Harada^1,2, Kosei Takahashi¹, Kota Tsujimori², Michio Kawase¹, Kenta Shimamoto³, Yuya Mizutani⁴, Seiya Mizutani⁴, Seiji Mizutani⁴, Kenta Murayama⁴ (1. Nagoya Univ. (Japan), 2. SSR Corp. (Japan), 3. Rigaku Corp. (Japan), 4. Mipox Corp. (Japan))

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